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Method of producing solution-derived metal oxide thin films
Method of producing solution-derived metal oxide thin films
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机译:溶液来源的金属氧化物薄膜的制造方法
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摘要
A method of preparing metal oxide thin films by a solution method. A . beta.-metal &bgr;-diketonate or carboxylate compound, where the metal is selected from groups 8, 9, 10, 11, and 12 of the Periodic Table, is solubilized in a strong Lewis base to form a homogeneous solution. This precursor solution forms within minutes and can be deposited on a substrate in a single layer or a multiple layers to form a metal oxide thin film. The substrate with the deposited thin film is heated to change the film from an amorphous phase to a ceramic metal oxide and cooled.
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