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Methods of forming a film on a substrate using complexes having tris(pyrazolyl) methanate ligands
Methods of forming a film on a substrate using complexes having tris(pyrazolyl) methanate ligands
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机译:使用具有三(吡唑基)甲烷酸酯配体的配合物在基材上形成膜的方法
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摘要
Methods of forming a film on a substrate using chemical vapor deposition techniques and pyrazolyl complexes. The complexes and methods are particularly suitable for the preparation of semiconductor structures.
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