Compensator amendment of the image formation device of existence in order to get near to the diffraction margin

摘要

(57) Abstract Because it is adjusted to the image aspect which can verify the position analytical limited reason imaginative (i) easily, the body is projected through the glass lens system (L). At least defect or Seidel aberration of the primary image is measured. Deformation in these aberrations, the warping or petsubaru buckling and sphere aberration of field, scene and astigmatism are included. intahuerometori is used in order to measure the aberration of the system. Position of the body is calculated on the basis of measurable quantity.