Gas arrival time delay cancellation manner and gas arrival time delay cancellation device and vapor phase epitaxially grown device

摘要

PROBLEM TO BE SOLVED: To dissolve an arrival time lag of a gas when pipelines connected to different groups have different lengths, by calculating the arriving time legs of the gas among the plural respective groups caused by the different lengths of the pipelines, and successively opening and closing each valve based on the time legs. ;SOLUTION: A metal organic vapor phase epitaxial growth system is provided with a pipeline for ING carrier gas, through which a plurality of gaseous starting material 1-n and counter gases 1-n are supplied to a reaction furnace and an exhaust pipeline for VENT carrier gas. A device for dissolving the arrival time lags of the gases controls the switching operations among gaseous starting materials 1-n and counter gases 1-n by opening and closing valves 1A-1D and nA-nD. At controlling of the switching operations, the arrival time lags of the gases among the groups are calculated based on the lengths, diameters, flow rates, etc., of pipelines for each group of the gaseous starting materials 1-n, and all of the gaseous starting materials 1-n are made to arrive at a reaction furnace simultaneously, by automatically successively opening and closing each of the valves 1A-1D and nA-nD in accordance with the time legs.;COPYRIGHT: (C)1999,JPO