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EXPOSURE SYSTEM, METHOD FOR REPLACING GAS, METHOD OF MANUFACTURING DEVICE, SEMICONDUCTOR MANUFACTURING PLANT, AND MAINTENANCE METHOD
EXPOSURE SYSTEM, METHOD FOR REPLACING GAS, METHOD OF MANUFACTURING DEVICE, SEMICONDUCTOR MANUFACTURING PLANT, AND MAINTENANCE METHOD
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机译:曝光系统,更换气体的方法,制造装置的方法,半导体制造厂和维护方法
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摘要
PROBLEM TO BE SOLVED: To quickly lower the concentration of the gas in a chamber at the beginning. ;SOLUTION: An exposure system is provided with a chamber surrounding a prescribed space, a first supply device that supplies a first gas into the chamber, and a second supply device that supplies a second gas different from the first gas into the chamber. The system is also provided with a switch mechanism which supplies either one of the gases into the chamber by switching the first and second supply devices to each other. Consequently, the stagnating gas replaced conventionally by molecular diffusion only can be replaced quickly.;COPYRIGHT: (C)2001,JPO
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