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Optical Integrated Circuit conversion displacement gauge

机译:光集成电路转换位移计

摘要

PURPOSE: To prevent the decrease of the S/N due to a stray light by providing a stray light shield for preventing the incidence from an interferometer for interfering a reflected light of an element to be measured with the output light of a light source to detecting means in a light integrated interferometer. ;CONSTITUTION: Stray light shields 11a-11d are so disposed in a light IC as not to introduce stray lights in photodetectors 6a-6c. If coupling loss occurs among a laser diode 1, SELFOC lenses 2, 4 and optical waveguides 100a-100c, 101a-101b, stray lights are propagated. The shields 11a-11d reflect or absorb the stray lights to prevent the stray lights from being incident to the photodetectors 6a-6c. As a result, noise is reduced, and the decrease of the S/N due to the stray lights can be prevented.;COPYRIGHT: (C)1995,JPO
机译:目的:为防止杂散光引起的信噪比降低,通过提供一种杂散光屏蔽罩来防止来自干涉仪的入射光,该干涉仪会干扰待测元素的反射光与光源的输出光进行干扰以进行检测指集成在光集成干涉仪中。 ;组成:杂散光罩11a-11d放置在光IC中,以免将杂散光引入光电检测器6a-6c中。如果在激光二极管1,SELFOC透镜2、4和光波导100a-100c,101a-101b之间发生耦合损耗,则杂散光会传播。护罩11a-11d反射或吸收杂散光以防止杂散光入射到光电检测器6a-6c。结果,降低了噪声,并且可以防止由于杂散光导致的S / N的降低。;版权所有:(C)1995,JPO

著录项

  • 公开/公告号JP3128039B2

    专利类型

  • 公开/公告日2001-01-29

    原文格式PDF

  • 申请/专利权人 横河電機株式会社;

    申请/专利号JP19940122203

  • 发明设计人 磯崎 克己;勝 淳一郎;

    申请日1994-06-03

  • 分类号G01B9/02;

  • 国家 JP

  • 入库时间 2022-08-22 01:33:22

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