X-RAY FLUORESCENCE ANALYZER, X-RAY DETECTOR USED THEREFOR AND PRODUCTION METHOD OF X-RAY INCIDENT WINDOW PART OF THE DETECTOR

摘要

PROBLEM TO BE SOLVED: To provide a new window member which permits detection of X-ray fluorescence in a wider range of the hard and soft X-ray areas for a higher performance in the X-ray fluorescence analyzer and the X-ray detector. SOLUTION: In the X-ray fluorescence analyzer which irradiates a sample S placed in a vacuum sample chamber 100 with X rays from an X-ray tube 200 to analyze the X-ray fluorescence KX generated from the sample with a spectroscopic element 350 and measures and analyzes the intensity of the X-ray fluorescence, spectrally analyzed, with an X-ray detector 400, a window material of the incident window part 420 of the X-ray detector 400 for measuring the intensity of the X-ray fluorescence is made up of a thin film layer 432 produced by sputtering vapor deposition of a substance having an absorbing end near on the short wave side of the X-ray fluorescence, for example, boron, carbon, boron carbide, boron nitride, boron oxide and carbon nitride on a support member 431 with a mesh-like opening part 433.