PROBLEM TO BE SOLVED: To obtain a piezoelectric triaxial accelerometer having no need of adjusting the level variation of X-, Y-, and Z-axis acceleration signals by means of a signal amplifier circuit. ;SOLUTION: Layers 27-31 having low dielectric constants are formed between the portions of connecting lines L1-L5 positioned in parts of a an area 8A facing a weight and another area 8B facing a base and a piezoelectric ceramic substrate 7a and not formed between the portions of the connecting lines L1, L2, L4, and L5 positioned in a stress generating area 8C and the substrate 7a. Counter electrodes are formed in such shapes that the electrodes follow the contours of an electrode row formed of acceleration detecting electrodes EX1-EZ4 so that the electrode may not be faced oppositely to the connecting lines L1-L5 as much as possible through the substrate 7a.;COPYRIGHT: (C)2001,JPO
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