MEMS DEVICE ATTENUATING LIGHT, VARIABLE LIGHT ATTENUATING SYSTEM, LIGHT ATTENUATING METHOD AND MANUFACTURING METHOD OF MEMS VARIABLE LIGHT ATTANUATOR.

摘要

PROBLEM TO BE SOLVED: To provide a micro electromechanical system(MEMS) type variable light attenuator having such performance that the attenuating action of light is executed extending over the whole range of light power. ;SOLUTION: An MEMS actuator 14 whose arch beam is curved by heat driving is formed at the upper surface of a micro-electronic substrate 12. Besides, an actuator member 14 is coupled to the arch beam of the actuator 14 and a light shutter 16 is coupled to the tip of the actuator member 14. Then, a light beam 20 is passed through the aperture 18 of the substrate 12. the beam 20 is attenuated by moving the shutter 16 so as to make it cross the path of the beam 20 by heating and driving the actuator 14. By clamping the actuator member 22 at a desired attenuating position by using a clamping element 24, the shutter 16 is held at the attenuating position.;COPYRIGHT: (C)2001,JPO