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Production manner of disordered conversion crystalline structure, production manner of semiconductor laser and production manner null of window structural semiconductor

机译:无序转换晶体结构的生产方式,半导体激光器的生产方式和窗口结构半导体的生产方式无效

摘要

PROBLEM TO BE SOLVED: To provide a process for the production of a disordered crystal structure to enable easy production of a disordered crystal structure free from spontaneous ordering of the crystal constituting atoms, a process for the production of a semiconductor laser containing an excellent MQW active layer and having a narrow luminescent spectrum width and high gain and a process for the production of a simple window-structure semiconductor laser having high controllability and producible without using Zn diffusion process. ;SOLUTION: A crystal having a disordered crystal structure 250 is formed on or near a substrate 200 by a crystal growth method using a surfactant. The surfactant varies the surface energy during the crystal growth and disturbs the surface rearrangement structure. Accordingly, a uniformly disordered semiconductor laser having good MQW structure can be produced on the substrate. A window-structure semiconductor laser having good controllability can be realized without using an unnecessary heat-history such as Zn diffusion by growing a crystal after depositing the surfactant on the substrate in the form of a pattern.;COPYRIGHT: (C)1999,JPO
机译:要解决的问题:提供一种生产无序晶体结构的方法,以使无序晶体结构的生产容易而又不使构成原子的晶体自发地有序排列。具有窄的发光光谱宽度和高增益的半导体层和不使用Zn扩散工艺生产具有高可控性和可生产性的简单窗口结构半导体激光器的工艺。 ;解决方案:通过使用表面活性剂的晶体生长方法,在基板200上或附近形成具有无序晶体结构250的晶体。表面活性剂在晶体生长过程中改变表面能并扰乱表面重排结构。因此,可以在基板上产生具有良好的MQW结构的均匀无序的半导体激光器。在将表面活性剂以图案形式沉积在基板上之后,通过生长晶体,可以实现具有良好可控性的窗口结构半导体激光器,而无需使用诸如锌扩散之类的不必要的热历史。COPYRIGHT:(C)1999,JPO

著录项

  • 公开/公告号JP3132433B2

    专利类型

  • 公开/公告日2001-02-05

    原文格式PDF

  • 申请/专利权人 日本電気株式会社;

    申请/专利号JP19970246712

  • 发明设计人 藤井 宏明;

    申请日1997-09-11

  • 分类号C30B29/40;H01L21/20;H01L21/205;H01S5/323;

  • 国家 JP

  • 入库时间 2022-08-22 01:32:39

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