INFINITESIMAL LIGHT SOURCE FOR GENERATING FLUORESCENT X RAY AND LIGHT SOURCE DEVICE USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a suitable infinitesimal light source that is used to nondestructively observe an internal constitution of a minute structure such as a micromachine and an ink jet head. ;SOLUTION: An element or an element compound for generating fluorescent X rays 7 with a prescribed wave length is used as an infinitesimal light source 1 for generating fluorescent X rays. The infinitesimal region of the light source 1, whose diameter is 0.1 μm to 100 μm and whose length is 0.1 μm to 10 mm, is a point or linear. The infinitesimal light source 1 is located in a plate container 3 sandwiched between capillary wave guide routes with thin plates which is made of light elements such as SiO2 glass and whose thickness is 20 μm or less or between two thin plates. The inside of the capillary wave guide routes or the container 3 is vacuum or is filled with a substance 2 made of light elements such as C.;COPYRIGHT: (C)2001,JPO