APPARATUS AND METHOD FOR MEASUREMENT OF PIEZOELECTRIC CONSTANT OF PIEZOELECTRIC THIN FILM

摘要

PROBLEM TO BE SOLVED: To provide a measuring apparatus whose accuracy and reproducibility are high and which is low-cost in the measurement of the piezoelectric constant of a piezoelectric thin film used as an actuator for a silicon surface micromachine device and to provide its measuring method.;SOLUTION: A sample substrate 1 on which the piezoelectric thin film 2 is formed is pressed down by a load needle 4 from the upper part, and a piezoelectric charge generated is measured by a charge amplifier 10 and a personal computer 12. The load needle 4 is fixed to a member 5 which has compliance only in the up-and-down direction, and the member 5 is fixed to a Z-stage 6. Thereby, when the Z-stage 6 is moved up and down, the load needle 4 can press down the same place on the sample substrate 1 with good reproducibility, and, at the same time, a load can be controlled by the deformation amount of the member 5. The precise distribution of strains can be calculated by a measurement by an electronic balance 9, and an electric noise can be removed by the signal processing of the personal computer 12. Thereby, the piezoelectric constant can be measured stably by a simple constitution.;COPYRIGHT: (C)2001,JPO