APPARATUS AND METHOD FOR MEASUREMENT OF TRANSVERSE PIEZOELECTRIC COEFFICIENT OF PIEZOELECTRIC THIN FILMS BY MEASUREMENT OF QUANTITY OF ELECTRIC CHARGE

摘要

invention measures the amount of charge on the piezoelectric properties of the piezoelectric thin film in the cross-direction of the measurement apparatus and method for such, More specifically, the micro-sensors (micro sensor) or the actuator (actuator) piezoelectric thin film tensile tests on the specimen through the displacement, strain, and the charge amount measuring apparatus for measuring the transverse piezoelectric constant of the piezoelectric thin film and the like therefrom for use in making and a method. ; According to the present invention, when measuring the transverse piezoelectric constant of the piezoelectric thin film composed of a piezoelectric material, putting the load of the tension system than the bending, strain, and integrated in the process, By measuring the amount of charge that is, enables precise and reliable to measure the piezoelectric constant of the piezoelectric thin film. From this, a variety of studies on the lateral piezoelectric properties of the piezoelectric thin film material is to enable a stable reliability can be evaluated for the product, as well as the piezoelectric mature research on the performance of products using the thin-film piezoelectric material.