PROBLEM TO BE SOLVED: To provide an illuminating device for inspecting a defect capable of discriminating a three-dimensional defect like a pit, a dent or the like from a two-dimensional defect based on variation in reflectivity. ;SOLUTION: In this illuminating device for inspecting a defect, in imaging a CCL2 by a line sensor camera 4, and inspecting a defect according to an image pickup signal, an image pickup surface 3 imaged by the line sensor camera 4 is illuminated. The illuminating device 50 is constituted by plural light sources 51 to 53, the respective light sources 51 to 53 are disposed to be different in illuminating configuration of the light sources 51 to 53, and illumination of the light sources 51 to 53 is switched according to the image pickup timing of the line sensor camera 4.;COPYRIGHT: (C)2001,JPO
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