UNEVENNESS DEFECT DETECTION METHOD AND DEVICE, SPATIAL FILTER, UNEVENNESS DEFECT INSPECTION SYSTEM, AND PROGRAM FOR UNEVENNESS DEFECT DETECTION METHOD

摘要

PROBLEM TO BE SOLVED: To obtain an unevenness defect detection method for enhancing unevenness constituents only and detecting unevenness more reliably, to provide a device for detecting unevenness defects automatically, and to provide an inspection system, or the like.;SOLUTION: An unevenness detection processing means 7C repeats processes for obtaining the difference in luminance between a pixel that becomes an arbitrary reference and two pixels that are symmetrical with respect to a point with prescribed distance with the reference pixel as a center from image data based on an image to be detected, determining one of the differences in luminance with two pixels or a prescribed value as a tentative value in the two pixels, based on the correlation relationship with the luminance value of two pixels that are symmetrical with respect to a point, successively changing two pixels that are symmetrical with respect to a point with the reference pixel, and determining the tentative value by obtaining the difference in luminance between two pixels, and hence determining the value of an unevenness constituent emphasis result in a pixel that becomes a reference, based on a determined tentative value in the two pixels.;COPYRIGHT: (C)2006,JPO&NCIPI