TRANSMISSION ELECTRON MICROSCOPE OBSERVATION SAMPLE PREPARING METHOD FOR SOLID PHASE REACTIVE SAMPLE AND CHARGED PARTICLE BEAM DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a transmission electron microscope observation sample preparing method for a solid phase reactive sample and a charged particle beam device. SOLUTION: In this transmission electron microscope observation sample preparing method, for working a transmission electron microscope observation sample concerned with a solid phase reaction with convergent charged particle beams, a small thermocouple is fixed to the observation site of the sample by means of reactive gas emission accompanied with charged particle beam irradiation, a temperature and a charged particle image of the observation site is observed with the sample heated, cooling gas is blown to the sample for freezing the high temperature condition when a predetermined temperature or a reaction condition is attained, and subsequently, the observation site, is extracted by convergent charged particle beam working. This charged particle beam device is provided with a sample stage having a heating means and the small thermocouple, a manipulator for moving the small thermocouple, a reactive gas source for fixing the small thermocouple to the sample, and a cooling gas source for quickly cooling.