SILICON SINGLE CRYSTAL, EPITAXIAL WAFER, METHOD OF MEASURING AMOUNT OF NITROGEN IN SILICON SINGLE CRYSTAL, SAMPLE TUBE UNIT USED IN ESR METHOD AND METHOD OF MEASURING ESR SPECTRA

摘要

PROBLEM TO BE SOLVED: To provide a sample tube unit used for measuring high sensitivity electron spin resonance spectra in order to guarantee the quality of a silicon single crystal and an epitaxial wafer. ;SOLUTION: The sample tube unit is constituted of a fixing member which has a form suitable to be fixed in a cavity resonator constituting an ESR (electron spin resonance) measuring device, a manipulating member 2a which can be inserted into the fixing part in such a state that a sample is fixed at its tip end and which is capable of manipulating the movement of the sample in the fixing part from the outside of the fixing part and a closing member 3a which is capable of always maintaining the inside of the fixing part in the closed state even when the manipulating part 2a is moved in the fixing part.;COPYRIGHT: (C)2001,JPO