SURFACE ANALYTICAL DEVICE EQUIPPED WITH ENERGY DISPERSIVE X-RAY DETECTOR

摘要

PROBLEM TO BE SOLVED: To provide a surface analytical device by using an EDS capable of obtaining an accurate two-dimensional X-ray intensity.;SOLUTION: An electron probe micro-analyzer for executing elemental analysis by detecting an X-ray generated by irradiating the surface of a sample 6 with an electron beam from an electron gun 1, is composed of an EDS comprising a semiconductor detector 9 for detecting the intensity IR of an electron beam or an X-ray generated from the sample surface by scanning a sample stage 7 two-dimensionally and a multi-channel analyzer, a control-operation processing device 11 for timing, in every one pixel, an insensitive time T of the EDS in the time when the X-ray intensity of one pixel is counted, A data memory means 12 for memorizing corrected X-ray intensity obtained by correcting a loss portion by the insensitive time T of the X-ray intensity of corresponding each pixel based on the timed insensitive time T, and a cathode- ray tube 14 for displaying an element distribution on the sample surface based on the corrected X-ray intensity.;COPYRIGHT: (C)2001,JPO