MANUFACTURING METHOD OF TARGET FOR INORGANIC ELECTROLUMINESCENT PHOSPHOR THIN FILM, PHOSPHOR THIN FILM, INORGANIC ELECTROLUMINESCENT ELEMENT AND SULFIDE PHOSPHOR THIN FILM

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method of a target for an inorganic electroluminescent(EL) phosphor thin film which suppresses lack of sulfur, does not require a noxious gas removal apparatus and safety measure, has high crystallinity of the sulfide thin film and affords a sulfide phosphor thin film with excellent luminance, efficiency and color purity, and a phosphor thin film, an inorganic EL device and a sulfide phosphor thin film using the target. ;SOLUTION: The target for an inorganic EL phosphor thin film is composed of a basic material of a II-group sulfur compound, a II-group-III-group-sulfur compound or rare earth sulfides as a main constituent and contains 5 to 50 mol% of one or two kinds from magnesium sulfide, calcium sulfide and zinc sulfide (in conversion to MgS, CaS and ZnS). The invention also provides a manufacturing method of a phosphor thin film and an inorganic EL phosphor thin film formed by using it and a sulfide phosphor thin film using it.;COPYRIGHT: (C)2001,JPO