LIQUID DOUBLE ALKOXIDE OF NIOBIUM, TANTALUM AND LITHIUM, ITS PRODUCTION AND PRODUCTION OF MULTIPLE OXIDE DIELECTRIC THIN FILM USING IT

摘要

PROBLEM TO BE SOLVED: To provide a new double alkoxide of niobium, tantalum and lithium hard to be thermal-dissociated, being in a leg. at room temp. and having the properties of beihng capable of distillation, to provide a method for producing it and to provide a method for producing a multiple oxide dielectric thin film using the compd. ;SOLUTION: This new compd. LiM(OC2H5)4(OC2H4OCH3)2 (M is Nb orTa) is a liq. at room temp., is hard to thermal-dissociated and has the vapor pressure of about 0.3 Torr at 190°C. The compd. can be produced by bringing Li(OC2H4 OCH3) into reaction with M(OC2H5)4(OC2H4OCH3) and next distillating and recovering the same. By using the compd. as the raw material for a CVD method, an LiNbO3 thin film and an LiTaO3 thin film for optical elements can be produced.;COPYRIGHT: (C)2001,JPO