首页>
外国专利>
Niobium, liquid double alkoxide and its manufacturing method of a tantalum and lithium as well as the preparation of complex oxide dielectric thin film using the same
Niobium, liquid double alkoxide and its manufacturing method of a tantalum and lithium as well as the preparation of complex oxide dielectric thin film using the same
展开▼
机译:铌,液态双醇盐及其钽,锂的制造方法以及使用其制备复合氧化物介电薄膜的方法
展开▼
页面导航
摘要
著录项
相似文献
摘要
PROBLEM TO BE SOLVED: To provide a new double alkoxide of niobium, tantalum and lithium hard to be thermal-dissociated, being in a leg. at room temp. and having the properties of beihng capable of distillation, to provide a method for producing it and to provide a method for producing a multiple oxide dielectric thin film using the compd. ;SOLUTION: This new compd. LiM(OC2H5)4(OC2H4OCH3)2 (M is Nb orTa) is a liq. at room temp., is hard to thermal-dissociated and has the vapor pressure of about 0.3 Torr at 190°C. The compd. can be produced by bringing Li(OC2H4 OCH3) into reaction with M(OC2H5)4(OC2H4OCH3) and next distillating and recovering the same. By using the compd. as the raw material for a CVD method, an LiNbO3 thin film and an LiTaO3 thin film for optical elements can be produced.;COPYRIGHT: (C)2001,JPO
展开▼
机译:要解决的问题:提供一种新的铌,钽和锂的双烷氧基化合物,难于热分解。在室温下并具有能够蒸馏的性质,提供了一种制备方法,并提供了使用所述混合物制备多氧化物介电薄膜的方法。 ;解决方案:此新版本。 LiM(OC 2 H 5)4(OC 2 H 4 OCH 3)2(M为Nb或Ta)为液体。在室温下,其难以热解,并且在190℃下具有约0.3Torr的蒸气压。该compd。可以通过使Li(OC2H4OCH3)与M(OC2H5)4(OC2H4OCH3)反应,然后蒸馏并回收来制备。通过使用compd。作为CVD法的原料,可以制造光学元件用的LiNbO 3薄膜和LiTaO 3薄膜。版权所有:(C)2001,日本特许厅
展开▼