POSITIVE TYPE RADIATION SENSITIVE RESIN COMPOSITION FOR PRODUCTION OF PLATED/SHAPED BODY AND METHOD FOR PRODUCING PLATED/SHAPED BODY

摘要

PROBLEM TO BE SOLVED: To provide a positive type radiation sensitive resin composition for the production of a plated/shaped body capable of precisely forming a thick plated/shaped body such as a bump or wiring and excellent also in sensitivity, resolution, etc., and a method for producing the plated/shaped body using the composition. SOLUTION: The positive type radiation sensitive resin composition contains (A) a polymer having an acid dissociable functional group which is dissociated by an acid to form an acidic functional group and (B) a component which generates the acid when irradiated. The composition is also used as a positive type radiation sensitive resin film. The plated/shaped body is produced through a step for carrying out electroplating using a pattern formed on a substrate from the composition or the resin film as a template.