SOFT MAGNETIC FILM, PLANAR-TYPE MAGNETIC ELEMENT USING SOFT MAGNETIC FILM, FILTER AND THIN-FILM MAGNETIC HEAD

摘要

PROBLEM TO BE SOLVED: To manufacture a soft magnetic film, which shows high value in both its magnetic permeability μr' and its specific resistivity ρ and has superior high-frequency characteristics.;SOLUTION: In the case, where an FeaMbOc film is used as a soft magnetic film (each of (a), (b) and (c) respectively shows at.%), if the conditions of (a), (b) and (c) are respectively assumed to be 44.5≤a≤57.5, 8≤b≤19 and 30.5≤c≤41 and the sum of the (a), (b) and the (c) is assumed to be a+b+c=100, μr'.ρ value (×103) which is shown by multiplying the magnetic permeability μr' of the film by a specific resistance ρ(μΩ.cm) of the film can be set at a value larger than 600. If the soft magnetic film is used for a planar-type magnetic element and the like, magnetic device having superior high-frequency characteristics can be manufactured.;COPYRIGHT: (C)2001,JPO