The manufacturing method of the soft magnetic film and the soft magnetic film, and thin-film magnetic head, using the soft magnetic film, method of manufacturing the thin film magnetic head

摘要

PROBLEM TO BE SOLVED: To solve the problem in the conventional FeNi alloy which is not capable of meeting all requirements such as high saturation magnetic flux density, low stress, and low coercive force and not capable of manufacturing a thin film magnetic head that can cope with the future trend of increase in recording density.;SOLUTION: A lower magnetic pole layer 19 and/or an upper magnetic pole layer 21 are formed of FeNi alloy film by plating. The FeNi alloy film contains 55 to below 75 mass% Fe preferably 68 to 80 mass% Fe, and furthermore 0.116 to below 0.140 mass% S or 0.125 to 0.132 mass% S. By this setup, a thin film magnetic head which is capable of coping properly with an increase in recording density and excellent in corrosion resistance can be manufactured.;COPYRIGHT: (C)2002,JPO