DRY FINISHING METHOD OF PELLICLE FRAME, AND DRY FINISHING DEVICE THEREFOR

摘要

PROBLEM TO BE SOLVED: To provide a dry finishing method of a pellicle frame which dry finishes the pellicle frame washed by a detergent of an aqueous system at a low cost with high productivity while maintaining its surface clean, and a dry finishing device therefor.;SOLUTION: This dry finishing method of the pellicle frame after washing with an aqueous system detergent consists in immersing the pellicle frame into pure water, then drying the pellicle frame by making combination use of air drying and irradiation with IR rays while perpendicularly pulling up the pellicle frame on the water surface at a velocity of 0.5 to 10 mm/sec. The temperature of the pure water at which the pellicle frame is immersed is preferably 30 to 95°C and the water is circulated at all times through a filter 9.;COPYRIGHT: (C)2001,JPO