ELECTROSTATIC CHUCK WITH DESTATICIZING FUNCTION AND DESTATICIZATION METHOD OF THE ELECTROSTATIC CHUCK

摘要

PROBLEM TO BE SOLVED: To accurately measure charge amount left on a substrate, know the exact destaticized amount and surely eliminate charges from a substrate by arranging a destaticizing arm mounted to move on an electrostatic attraction stage. ;SOLUTION: The potential of a substrate 16 is raised through plasma discharge by a high frequency power supply 19. After a prescribed treatment time is elapsed, the high frequency power supply 19 is turned off and then an electrostatic chuck 13 is turned off successively. Thereafter, treated gas inside a vacuum chamber 10 is exhausted, and a destaticizing arm 14 is moved on an electrostatic attraction stage 11. The arm 14 comes into contact with the edge part of the substrate 16 on the stage 11 and eliminates the charges, and destaticized amount of the substrate 16 is detected by a measuring mechanism part 15. If destaticization is not sufficient, furthermore negative charge is forcibly applied to the arm 14 and charges left in the substrate 16 is eliminated rapidly. Since charges are thereby eliminated exactly from a substrate, a substrate will not jump up and down and misregistration, etc., will not occur.;COPYRIGHT: (C)2000,JPO