METHOD FOR CORRECTING MEASURED VALUE OF AND APPARATUS FOR CORRECTING MEASURED VALUE OF GAS PRESSURE, AND METHOD FOR DETECTING AND APPARATUS FOR DETECTING AIR LEAK OF SEALED CONTAINER USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide an apparatus for detecting an air leak which can obtain highly reliable pressure values independently of a state of gases, and quickly and correctly judge the presence/absence of an air leak in a simple constitution.;SOLUTION: A work 12 is stored in a measurement tank 14 having an initial tank internal pressure, which is connected to a reference pressure chamber 28 which can form a state of a reference pressure different from the initial tank internal pressure, whereby the internal pressure of the measurement tank 14 is changed. Since an inner space of the work 12 is assimilated to an inner space of the measurement tank 14 and a substantial inner volume is increased when an air leak is present in the work 12, a pressure where the measurement tank 14 reaches after being connected with the reference pressure chamber 28 increases as compared with the case where no air leak is present. This pressure change is detected by a pressure sensor 18 and, an absolute humidity of a gas sealed in the measurement tank 14 is measured. A measured pressure in the measurement tank 14 is corrected on the basis of the absolute humidity. The presence/absence of the air leak is judged by a control part 20 on the basis of the corrected pressure change.;COPYRIGHT: (C)2000,JPO