首页>
外国专利>
A SEMICONDUCTOR PRODUCTION SYSTEM AND RECOVERY OF AT LEAST ONE PERFLUOROCOMPOUND GAS FROM A GAS MIXTURE FLOWING FROM SUCH A SYSTEM
A SEMICONDUCTOR PRODUCTION SYSTEM AND RECOVERY OF AT LEAST ONE PERFLUOROCOMPOUND GAS FROM A GAS MIXTURE FLOWING FROM SUCH A SYSTEM
展开▼
机译:一种半导体生产系统,以及从这类系统中流过的至少一种全混合气体的回收
展开▼
页面导航
摘要
著录项
相似文献
摘要
Processes and systems to recover at least one perfluorocompound gas from a gas mixture are provided. In one embodiment the inventive process comprises the steps of a) providing a gas mixture comprising at least one perfluorocompound gas and at least one carrier gas, the gas mixture being at a predetermined pressure; b) providing at least one glassy polymer membrane having a feed side and a permeate side; c) contacting the feed side of the at least one membrane with the gas mixture; d) withdrawing from the feed side of the membrane as a non- permeate stream at a pressure which is substantially equal to the predetermined pressure a concentrated gas mixture comprising essentially the at least one perfluorocompound gas; and e) withdrawing from the permeate side of the membrane as a permeate stream a depleted gas mixture comprising essentially the at least one carrier gas.
展开▼