METHOD AND SYSTEM FOR REJUVENATING PRESSURIZED FLUID SOLVENTS USED IN CLEANING SUBSTRATES

摘要

Method and system of rejuvenating pressurized fluid solvents used for cleaning a substrate in a pressurized vessel (10). A primary flow (20) of the pressurized fluid solvent is continuously cycled from the pressurized vessel through a series of filters (32-38) to remove insoluble and soluble contaminants, and then returned to the pressurized vessel (10). A secondary flow (40) of the pressurized fluid solvent, preferably equivalent to less than about 40 % of the primary flow, is directed to an evaporator (42) to evaporate the pressurized fluid solvent of the secondary flow into a vapor and to separate the contaminants therefrom. The vapor form the evaporator is then either liquified by a compressor or condenser (54) to create rejuvenated pressurized fluid solvent and redirected to the pressurized vessel for further use, or vented to atmosphere and replaced by new pressurized fluid solvent from a supply tank. Pressure equalization lines (71, 73) extend between a storage tank (70) and various system components to allow solvent vapor to displace therebetween.