METAL ION REDUCTION OF AMINOAROMATIC CHROMOPHORES AND THEIR USE IN THE SYNTHESIS OF LOW METAL BOTTOM ANTI-REFLECTIVE COATINGS FOR PHOTORESISTS

摘要

The present invention provides a process for producing bottom anti-reflective coating compositions having a very low level of metal ions utilizing specially treated anion exchange resins. The present invention also provides a method for producing semiconductor devices by producing photoimages on a substrate using such bottom anti-reflective coating compositions.