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METHOD FOR IMPROVED TEMPERATURE CONTROL IN RAPID THERMAL PROCESSING (RTP) SYSTEMS
METHOD FOR IMPROVED TEMPERATURE CONTROL IN RAPID THERMAL PROCESSING (RTP) SYSTEMS
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机译:快速热加工(RTP)系统中改进温度控制的方法
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摘要
A method for Rapid Thermal Processing (RTP) is presented, wherein the broadband reflectivity of an object is measured, and the results of the measurement used by the RTP system to adjust the RTP system parameters used in processing the object.
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