LIQUID PRECURSORS EVAPORIZER MODULE FOR MODIFIED CHEMICAL VAPOR DEPOSITION(MCVD) PROCESS, CHEMICAL DELIVERY SYSTEM AND EVAPORATION METHOD OF LIQUID PRECURSORS

摘要

PURPOSE: An evaporation method of liquid precursor through a capillary driven flash evaporizer module(CDFEM), unlike a conventional bubbling evaporation, applied to chemical delivery system(CDS) is provided, which is characterized by using capillary effect to supply liquid precisely and infrared(800-900nanometer) heater to evaporate liquid in a flash. CONSTITUTION: The capillary driven flash evaporizer module(CDFEM) comprises the parts of: a rod(12) to pull liquid precursors through a bunch of porous capillaries(1-1000micrometer); a head(16) to keep it spread, where the upper side of head has 2-10degree tilt to a horizontal axis and a temperature sensor(15) lies; a coating layer storing precursors; a pot(11) to recover remaining precursors. The chemical delivery system(CDS) comprises a module (10), an infrared lamp to evaporize precursors, a gate valve to carry or stop carrying evaporated precursors to a supplying line.