METHOD FOR MANUFACTURING SMCO GROUP HARD MAGNETIC THIN FILM

摘要

PURPOSE: A method for manufacturing an SmCo group hard magnetic thin film is provided to manufacture the SmCo group thin film by controlling a process parameter appositely using a laser ablation process for manufacturing a thin film by irradiating an excimer laser beam to a target fixed in a reaction room. CONSTITUTION: In a method for manufacturing an SmCo group hard magnetic thin film, an SmCo group target consisted of Sm100-xCox(%) is fixed in a vaccum state of a reaction room and a single crystal Si substrate is heated. A pulse width of a fixed Q mode in Nd-YAG laser beam is set as 100-250 microsecond by prolonging an oscillation time optically after rotating the SmCo group target and the Si substrate. The Nd-YAG laser beam is irradiated on the target to form the SmCo group thin film on the substrate.