ZnS-SERIES SINTERED MATERIAL AND METHOD FOR PRODUCING THE SAME TARGET USING THE ZnS-SERIES SINTERED MATERIAL THIN FILM AND OPTICAL RECORDING MEDIUM USING THE THIN FILM

摘要

PURPOSE: A manufacturing method of ZnS-based sintered material is provided to improve excellent shaping property and to be used as a target for DC sputtering. CONSTITUTION: ZnS-based sintering material consists essentially of ZnS and contains niobium oxide. The sintering material is converted into a ZnS-based sintered compact and is used for a sputtering target by regulating the content of niobium oxide to 10-50wt% expressed in terms of Nb2O5 and by regulating the surface resistivity thereof to 10Omega/square surface. The target of the sintered compact can be utilized for DC sputtering having a high thin-film forming rate. The sintered compact is obtained by preparing a mixture of ZnS powder having an average particle diameter of 0.5-20 micrometers with niobium oxide powder having an average particle diameter of 5 micrometers, by hot pressing the resultant mixture at 800-1100deg.C and by providing the sintered compact of a desired shape.