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ZnS-series sintered material and method for producing the same, target using the ZnS-series sintered material, thin film, and optical recording medium using the thin film
ZnS-series sintered material and method for producing the same, target using the ZnS-series sintered material, thin film, and optical recording medium using the thin film
The ZnS-series sintered material of the present invention includes ZnS as a main component and niobium oxide. The content of the niobium oxide in the sintered material is preferably in the range from more than 5 to 50% by weight, in terms of Nb2O5. The sintered material can be used as the sputtering target. Since this target has a low resistance, it is possible to deposit a thin film using this target by direct current (DC) sputtering. By employing the DC sputtering, the deposition rate of the thin film can be increased. The resultant thin film is used as a protecting layer for protecting a recording layer in an optical recording medium for recording a signal of a laser beam.
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机译:本发明的ZnS系列烧结体以ZnS为主成分和氧化铌。以Nb 2 Sub> O 5 Sub>计,烧结材料中氧化铌的含量优选在大于5至50重量%的范围内。可以将烧结材料用作溅射靶。由于该靶的电阻低,因此可以使用该靶通过直流(DC)溅射来沉积薄膜。通过采用DC溅射,可以提高薄膜的沉积速率。所得的薄膜用作保护层,用于保护用于记录激光束信号的光学记录介质中的记录层。
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