OZONE CHECKING APPARATUS FOR WET ETCHING PROCESSING EQUIPMENT

摘要

PURPOSE: An ozone checking apparatus for a wet etching processing equipment is to prevent an erroneous operation due to an abnormal flow of an ozone and simplify a repair of the wet etching processing equipment. CONSTITUTION: A check valve unit(12) is connected to a cylinder module(11) and an ozone generator(13). The check valve unit supplies a piranha acid to a wafer container(16). A flow sensor(20) is mounted between supply pipes(21). The supply pipe connects the check valve unit and the ozone generator. The flow sensor detects an amount of the ozone flowing through the supply pipe. The supply pipe is formed in a V shape. An alarm device is installed in the flow sensor. The alarm device includes an analog-to-digital converter for converting an analog flow signal into a digital signal, a controller for generating a control signal, and an alarm lamp for receiving the control signal and generating an alarm signal.