Low temperature synthesis of carbon nanotubes using metal catalyst layer for decompsing carbon source gas

摘要

PURPOSE: A synthesis method of carbon nanotubes having high purity is provided which mass-synthesizes the carbon nanotubes vertically aligned on a large-sized base plate at lower temperature than a strain temperature of the large-sized base plate. CONSTITUTION: The method comprises steps of: (i) forming a catalytic metal film on a base plate; (ii) forming independently isolated nano-sized catalytic metal particles by etching the catalytic metal film; and (iii) growing the isolated nano-sized catalytic metal particles by a thermochemical vapor deposition method, which thermally decomposes a carbon source gas at a temperature of lower than the strain temperature of the base plate by using a catalytic metal film for decomposing the carbon source gas, in order to form plural carbon nanotubes vertically aligned on the base plate.