A wafer support mechanism of quartz boat for semiconductor's diffusion step

摘要

PURPOSE: A wafer support of a quartz boat for semiconductor diffusion process is provided to prevent previously a breakage of a wafer in a manufacturing process by restraining a drooping phenomenon or a distortion of the wafer. CONSTITUTION: A space portion for loading a multitude of wafer is formed in a quartz boat. The loaded wafers are supported by a body(10). Two or more support sections(20) are formed around an edge of the body(10). The edge of the wafer is supported by the support sections(20). A distortion prevention member(30) is formed on the edge of the body(10) in order to prevent the distortion of a center of the wafer. The center of the wafer is supported by the distortion prevention member(30).