METHOD FOR MANUFACTURE OF A COMPONENT MADE OF OPAQUE SYNTHETIC QUARTZ GLASS AND QUARTZ GLASS TUBE MANUFACTURED ACCORDING TO THE METHOD

摘要

The present invention relates to a method of making a component made of opaque synthetic quartz glass and to a quartz glass tube made by the method. For opaque made of a quartz glass to enable the tube or low-cost production of the tube section having a, component, in particular a thin wall, characterized in that it has a high chemical purity and a high level jeonghwakseongreul, the present invention is (i) 0.8 g / cm ³ or more Providing an initial material in the form of a granular material of high purity synthetic SiO ₂ composed of at least partially porous aggregates of SiO ₂ primary particles of granular material with dense bulk density, (ii) Proposes to fill the granular material and convert it to a opaque quartz glass preform via a melting process, and (iii) to reform the preform in a heat reshaping process to obtain a component in opaque quartz glass do. The manufactured quartz glass tube according to the present method, particularly a tube suitable for use in semiconductor production, has a wall thickness of the component in the range of 0.5 mm to 15 mm (Fig. 3), a lithium content of only 100 wt-ppb _{RTI ID = 0.0} SiO2 / _RTI