Erosion Resistant Nonreflecting Diamond-like Hard Carbon Films and Synthesis Thereof

摘要

PURPOSE: A method is provided which improves corrosion resistance for solid particles by improving mechanical properties of a membrane without change of optical characteristics while neither a fatally poisonous gas is used nor a thick membrane is coated. CONSTITUTION: The corrosion resistance non-reflective diamond-like rigid carbon membrane contains 0.1 to 10 atom% of silicon and has a thickness of 0.5 to 3 microns. In a method for depositing a diamond-like rigid carbon membrane on an optical substrate, the method for manufacturing the corrosion resistance non-reflective diamond-like rigid carbon membrane having a thickness of 0.5 to 3 microns is characterized in that hydrocarbon compounds are used as a carbon source, a silicon contained gas is used as a silicon source, the optical substrate is selected from the group consisting of Ge, Si, ZnS, ZnSe, MgF2 and sapphire, and silicon contains 0.1 to 10 atom% in a carbon membrane which is manufactured by controlling a partial pressure of silicon of the synthetic gas, wherein the deposition is carried out using a plasma chemical vapor deposition, sputtering, ion beam synthesis or ion plating, and wherein the plasma chemical vapor deposition is performed under the conditions of a high frequency of 10 to 50 MHz and a pressure of 1 m Torr to 100 Torr.