FIELD-EMISSION FILM-COATED CATHODE AND PROCESS OF ITS MANUFACTURE

摘要

FIELD: production of field emitters of electrons. SUBSTANCE: invention is related to production of high-efficiency films for field emitters of electrons which can be used in manufacture of flat displays, electron microcircuits, SHF electronics, light sources. Proposed field-emission cathode has substrate carrying carbon film in the form of irregular structure composed of carbon microribs and/or microfilaments oriented perpendicular to surface of substrate with scale of 0.01-1.0 and location density 0.1-10.0 mkm^-2. Process of manufacture of field-emission film- coated cathode involves initiation of D C discharge in atmosphere of mixture of hydrogen with carbon-carrying additive, heating of substrate and deposition of carbon phase on substrate located on anode. Specific features of process are: initiation of discharge with current density 0.15-0.5 A/sq.cm, deposition conducted in mixture of hydrogen with vapors of ethyl alcohol or methane under pressure 50-300 T and heating of substrate to temperature 600-900 C. Concentration of vapors of ethyl alcohol amounts in this case to 5-10% and of methane to 15-30%. Another version of manufacture of field-emission cathode includes initiation of SHF discharge with absorbed power 5-50 W/cu cm in mixture of carbon dioxide and methane with proportion 0.8:1.2 under pressure of 20-100 T and deposition of carbon phase on substrate with temperature of surface of substrate amounting to 500-700 C. EFFECT: manufacture of field-emission film-coated cathodes with high electron emission characteristics. 4 cl, 5 dwg