Microstructure for a microwave resonator consists of a planar substrate on which a high temperature superconducting layer is deposited which is then coated with an electrically conducting layer

摘要

Microstructure consists of a planar substrate on which a high temperature superconducting layer is deposited which is then coated with an electrically conducting layer. A microwave technical resonance structure is freely etched on one of the planes and the other plane is connected to a the housing base. The layer structure between the high temperature superconducting layer and the housing is held electrically non-conducting in the region of the resonator structure present on the substrate. An electrically conducting contact layer remains outside of the resonator region and is a heat bridge between the resonator structure and the housing. Preferred Features: The electrically non-conducting zone between the high temperature superconducting layer and the housing is filled with a dielectric made of amorphous a-SiO2 or a-Si3N4.