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Automatic tuning method and device for HF impedance matching network for plasma process uses cyclic measurement of electrical parameters and adjustment of tuning components in alternation
Automatic tuning method and device for HF impedance matching network for plasma process uses cyclic measurement of electrical parameters and adjustment of tuning components in alternation
The tuning method and device for a HF impedance matching network uses measurement of electrical values required for tuning during the cyclic switching in times, with corresponding adjustment of the electrical tuning components during the switching out times.
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