A solid-state impedance matching system comprising a hybrid tuning network having a switchable co-tuning network and a varactor fine tuning network

摘要

The present invention relates to an electronically variable capacitor including a coarse and fine tuning network. The coarse tuning network receives a radio frequency (RF) input signal from an RF generator; Outputting an RF output signal to a reference terminal or a load; And a circuit for receiving a direct current (DC) bias voltage. This circuit is switched between the first state and the second state. The capacitance of the circuit is based on the first DC bias voltage during the first state and is not based on the first DC bias voltage during the second state. The fine tuning network is connected in parallel with the coarse tuning network and includes a varactor. The varactor includes: a first diode receiving an RF input signal; And a second diode connected in a back-to-back configuration with the first diode and outputting an RF output signal to a reference terminal or load. The capacitance of the varactor is based on a second received DC bias voltage.