首页> 外国专利> Production of semiconductor device comprises forming dielectric material on component structure and filling chambers between structures, chemical-mechanical polishing and forming fluid insulating material on dielectric

Production of semiconductor device comprises forming dielectric material on component structure and filling chambers between structures, chemical-mechanical polishing and forming fluid insulating material on dielectric

机译:半导体器件的生产包括在部件结构上形成电介质材料和结构之间的填充室,化学机械抛光以及在电介质上形成流体绝缘材料

摘要

Production of a semiconductor device comprises forming a dielectric material (112) on a component structure (102) and filling the chambers between the structures; chemical-mechanical polishing the dielectric material and forming a fluid insulating material (118) on the dielectric material to produce a planar surface.
机译:半导体器件的生产包括在部件结构(102)上形成电介质材料(112)并填充结构之间的腔室;化学机械抛光介电材料并在介电材料上形成流体绝缘材料(118)以产生平坦表面。

著录项

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号