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Optical surface reference measurement unit has two sensors compares differences with original calibration detects measurement errors and optics degradation
Optical surface reference measurement unit has two sensors compares differences with original calibration detects measurement errors and optics degradation
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机译:光学表面参考测量单元具有两个传感器,将差异与原始校准进行比较以检测测量误差和光学器件退化
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摘要
The optical surface reference measurement method unit uses a light source (3) and two measurement units (10,20) to record the signal from a reference surface (8) and derive the difference between differences from an original calibration measurement. Measurements are stored in computer memory.
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