Equipment for detecting and correcting measurement errors, comprises measuring sensor for sample placed on measuring surface and control sensor applied to reference surface joined to measuring surface

摘要

A sample (2) is placed on a measurement surface (1) and dimensions are taken by a measurement sensor (3). The measurement surface is joined (6) to a reference surface (4) where a control sensor (5) measures by optical or inductive methods any parasitic movements likely to cause measurement errors. The measurement and reference data are supplied to a computer (7) which detects and corrects any errors due to support movement