Transport system for substrates in plant with several processing stations has substrate carrier with at least two runners with which it can be supported on roller path and moved through plant

摘要

A transport system for substrates in a plant with several processing stations has the substrates held in a transport device which is moved on a driven roller path to the individual processing stations. As a transport device, a substrate carrier (2) is present which has at least two runners (27) with which it can be supported on the roller path and be moved by this through the plant. The substrate carrier has at least one substrate holder (1) for the retention of the substrate. The roller path has several independent roller path sections (4) which are assigned preferably each to one processing station. At least at one processing station, at least one light barrier (21-23) with a light sensor and a light receiver is arranged so that its light beam runs essentially at right angles to the movement direction of the substrate carrier.