Deformable mirror for laser material machining apparatus, has actuator supported against rear side of mirror plate at diametrally opposite positions that are displaced radially out of longitudinal axis of mirror

摘要

The deformable mirror (11) has translatory actuator (20) arranged between rear side of mirror plate and mirror housing (12). The actuator is supported against the rear side of plate at diametrally opposite positions which are displaced radially out of the longitudinal axis (21) of the mirror. A mirror surface (17) which is opposite to the plate, is curved in the form of hollow spherical portion by actuator coaxially engaged against the plate.