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Use of chemically sensitive semiconductor material containing chalcogens or chalcogenides for detecting gaseous and vaporous analytes in gases
Use of chemically sensitive semiconductor material containing chalcogens or chalcogenides for detecting gaseous and vaporous analytes in gases
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机译:包含硫族元素或硫族元素化物的化学敏感性半导体材料用于检测气体中的气态和气态分析物的用途
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摘要
Use of a chemically sensitive semiconductor material (2) containing chalcogens or chalcogenides for detecting gaseous and vaporous analytes (6) in gases is new. The detection of the gases/vapors is based on a change of the electronic, dielectric, mechanical/acoustic or optical properties of the semiconductor material. An Independent claim is also included for a sensor with a chemically sensitive semiconductor material as transducer element for detecting gaseous and vaporous analytes (6) in gases. Preferred Features: The semiconductor material contains tellurium or one of the following binary alloys: Na-Te, AK-Te, Rb-Te, Cs-Te, Si-Te, Ge-Te, Sn-Te, As-Te, Sb-Te, Bi-Te, S-Te, Se-Te or Te-Te.
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